

- ÖÐÎÄ
- English

2018Äê9ÔÂ⣬ÓÉÉòÑôÍØ¾£¿Æ¼¼ÓÐÏÞ¹«Ë¾×ÔÖ÷ÑÐÖÆµÄ12Ó¢´çÔ×Ó²ã³Á»ý£¨Atomic Layer Deposition£¬ALD£©×°±¸Í¨¹ýÁ˿ͻ§µÄÑéÊÕ¡£
ALD×°±¸ÊǼ¯³ÉµçÂ·ÖÆ±¸Àú³ÌÖÐÒªº¦µÄ±¡Ä¤³Á»ý×°±¸£¬±»ÊÓΪÏȽø°ëµ¼Ì幤ÒÕÊÖÒÕÉú³¤µÄÒªº¦»·½ÚÖ®Ò»¡£ÕýµãÓÎÏ·¹Ù·½Íø¹«Ë¾»ùÓÚÒÑͨ¹ýÉú²úÑéÖ¤µÄ¸ß²úÄÜPECVD×°±¸Æ½Ì¨£¬ÀÖ³ÉÑÐÖÆÁ˺£ÄÚÊ×̨Á¿²úÐÍ12Ó¢´çALD×°±¸£¬²¢Ñ¸ËÙÍÆÏòÊг¡£¬¿ÉÓ¦ÓÃÓÚ28nmÒÔÉϼ«´ó¹æÄ£¼¯³Éµç·£¬OLED¼°ÏȽø·â×°£¨TSV£©ÁìÓò£¬Í¶ÈëÏȽøÉú²úÏߣ¬ÓÃÓÚ³Á»ýSiO2£¬SiNxµÈ¾øÔµ±¡Ä¤¡£¸Ã×°±¸ÒÑÀֳɽøÈëÊÔÉú²úÏßÉóºËÑéÖ¤£¬Àúʱ3¸ö¶àÔ£¬Í¨¹ýÁ˿ͻ§µÄÉóºËÑéÊÕ£¬×°±¸¸÷ÏîÐÔÄÜÖ¸±ê¾ùÖª×ãÒªÇó£¬ÇÒµÖ´ï»òÁè¼ÝÁ˹ú¼ÊͬÀà²úÆ·µÄÏȽøË®Æ½£¬ÕâÊÇÎÒ¹úÔÚʵÏÖ°ëµ¼Ìå×°±¸¹ú²ú»¯Àú³ÌÖеÄÓÖÒ»ÖØ´óÍ»ÆÆ¡£